* got from http://www.mosis.com/cgi-bin/cgiwrap/umosis/swp/params/tsmc-018/t64h_lo_epi-params.txt

*                                         
*                           MOSIS WAFER ACCEPTANCE TESTS
*                                         
*          RUN: T64H (LO_EPI)                                VENDOR: TSMC
*   TECHNOLOGY: SCN018                                FEATURE SIZE: 0.18 microns
*                                  Run type: SKD
*
*
*INTRODUCTION: This report contains the lot average results obtained by MOSIS
*              from measurements of MOSIS test structures on each wafer of
*              this fabrication lot. SPICE parameters obtained from similar
*              measurements on a selected wafer are also attached.
*
*COMMENTS: DSCN6M018_TSMC
*
*
*TRANSISTOR PARAMETERS     W/L       N-CHANNEL P-CHANNEL  UNITS
*                                                        
* MINIMUM                  0.27/0.18                     
*  Vth                                    0.53     -0.53  volts
*                                                        
* SHORT                    20.0/0.18                     
*  Idss                                 554      -275     uA/um
*  Vth                                             -0.52  volts
*  Vpt                                    4.7      -5.5   volts
*                                                        
* WIDE                     20.0/0.18                     
*  Ids0                                  12.7     -10.7   pA/um
*                                                        
* LARGE                    50/50                         
*  Vth                                    0.44     -0.42  volts
*  Vjbkd                                  3.2      -4.1   volts
*  Ijlk                                 <50.0     <50.0   pA
*                                                        
* K' (Uo*Cox/2)                         167.1     -35.8   uA/V^2
* Low-field Mobility                    396.81     85.01  cm^2/V*s
*                                                        
*COMMENTS: Poly bias varies with design technology. To account for mask
*           bias use the appropriate value for the parameters XL and XW
*           in your SPICE model card.
*                       Design Technology                   XL (um)  XW (um)
*                       -----------------                   -------  ------
*                       SCN6M_DEEP (lambda=0.09)             0.00    -0.01
*                                     thick oxide            0.00    -0.01
*                       SCN6M_SUBM (lambda=0.10)            -0.02     0.00
*                                     thick oxide           -0.02     0.00
*
*
*FOX TRANSISTORS           GATE      N+ACTIVE  P+ACTIVE  UNITS
* Vth                      Poly         >6.6     <-6.6   volts
*
*
*
*PROCESS PARAMETERS     N+    P+    POLY  N+BLK  PLY+BLK    M1     M2   UNITS
* Sheet Resistance       6.7   7.8  7.9    61.1   301.7    0.08   0.08  ohms/sq
* Contact Resistance    10.7  11.2  9.9                           4.50  ohms
* Gate Oxide Thickness  41                                              angstrom
*                                                                      
*PROCESS PARAMETERS     M3   POLY_HRI     M4      M5       M6    N_W     UNITS
* Sheet Resistance     0.08              0.07    0.07     0.03    941    ohms/sq
* Contact Resistance   8.78             12.40   16.29    18.09           ohms
*                                                                       
*COMMENTS: BLK is silicide block.
*
*
*CAPACITANCE PARAMETERS  N+   P+  POLY M1 M2 M3 M4  M5  M6  D_N_W  N_W   UNITS
* Area (substrate)      973 1161  104  39 19 13  8   8   3          124  aF/um^2
* Area (N+active)                8355  55 20 14 11   9   8               aF/um^2
* Area (P+active)                8187                                    aF/um^2
* Area (poly)                          65 17 10  7   6   5               aF/um^2
* Area (metal1)                           37 14  9   7   5               aF/um^2
* Area (metal2)                              38 14   9   7               aF/um^2
* Area (metal3)                                 39  15   9               aF/um^2
* Area (metal4)                                     39  15               aF/um^2
* Area (metal5)                                         39               aF/um^2
* Area (r well)         996                                              aF/um^2
* Area (no well)        143                                              aF/um^2
* Fringe (substrate)    265  221          58 53 41  23                   aF/um
* Fringe (poly)                        67 39 29 24  20  17               aF/um
* Fringe (metal1)                         56 36     22  19               aF/um
* Fringe (metal2)                            48 36  27  23               aF/um
* Fringe (metal3)                               54  35  28               aF/um
* Fringe (metal4)                                   54  33               aF/um
* Fringe (metal5)                                       44               aF/um
* Overlap (N+active)              708                                    aF/um
* Overlap (P+active)              632                                    aF/um
*                                                                       
*
*
*CIRCUIT PARAMETERS                            UNITS      
* Inverters                     K                         
*  Vinv                        1.0       0.75  volts      
*  Vinv                        1.5       0.80  volts      
*  Vol (100 uA)                2.0       0.08  volts      
*  Voh (100 uA)                2.0       1.64  volts      
*  Vinv                        2.0       0.83  volts      
*  Gain                        2.0     -22.87             
* Ring Oscillator Freq.                                   
*  D1024_THK (31-stg,3.3V)             316.21  MHz        
*  DIV1024 (31-stg,1.8V)               393.20  MHz        
* Ring Oscillator Power                                   
*  D1024_THK (31-stg,3.3V)               0.07  uW/MHz/gate
*  DIV1024 (31-stg,1.8V)                 0.02  uW/MHz/gate
*                                                         
*COMMENTS: DEEP_SUBMICRON
*
*
*
*
* T64H SPICE BSIM3 VERSION 3.1 PARAMETERS
*
*SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8

* DATE: Jul 12/06
* LOT: T64H                  WAF: 0005
* Temperature_parameters=Default
.MODEL CMOSN NMOS (                                LEVEL   = 49
+VERSION = 3.1            TNOM    = 27             TOX     = 4.1E-9
+XJ      = 1E-7           NCH     = 2.3549E17      VTH0    = 0.3823463
+K1      = 0.5810697      K2      = 4.774618E-3    K3      = 0.0431669
+K3B     = 1.1498346      W0      = 1E-7           NLX     = 1.910552E-7
+DVT0W   = 0              DVT1W   = 0              DVT2W   = 0
+DVT0    = 1.2894824      DVT1    = 0.3622063      DVT2    = 0.0713729
+U0      = 280.633249     UA      = -1.208537E-9   UB      = 2.158625E-18
+UC      = 5.342807E-11   VSAT    = 9.366802E4     A0      = 1.7593146
+AGS     = 0.3939741      B0      = -6.413949E-9   B1      = -1E-7
+KETA    = -5.180424E-4   A1      = 0              A2      = 1
+RDSW    = 105.5517558    PRWG    = 0.5            PRWB    = -0.1998871
+WR      = 1              WINT    = 7.904732E-10   LINT    = 1.571424E-8
+XL      = 0              XW      = -1E-8          DWG     = 1.297221E-9
+DWB     = 1.479041E-9    VOFF    = -0.0955434     NFACTOR = 2.4358891
+CIT     = 0              CDSC    = 2.4E-4         CDSCD   = 0
+CDSCB   = 0              ETA0    = 3.104851E-3    ETAB    = -2.512384E-5
+DSUB    = 0.0167075      PCLM    = 0.8073191      PDIBLC1 = 0.1666161
+PDIBLC2 = 3.112892E-3    PDIBLCB = -0.1           DROUT   = 0.7875618
+PSCBE1  = 8E10           PSCBE2  = 9.213635E-10   PVAG    = 3.85243E-3
+DELTA   = 0.01           RSH     = 6.7            MOBMOD  = 1
+PRT     = 0              UTE     = -1.5           KT1     = -0.11
+KT1L    = 0              KT2     = 0.022          UA1     = 4.31E-9
+UB1     = -7.61E-18      UC1     = -5.6E-11       AT      = 3.3E4
+WL      = 0              WLN     = 1              WW      = 0
+WWN     = 1              WWL     = 0              LL      = 0
+LLN     = 1              LW      = 0              LWN     = 1
+LWL     = 0              CAPMOD  = 2              XPART   = 0.5
+CGDO    = 7.08E-10       CGSO    = 7.08E-10       CGBO    = 1E-12
+CJ      = 9.68858E-4     PB      = 0.8            MJ      = 0.3864502
+CJSW    = 2.512138E-10   PBSW    = 0.809286       MJSW    = 0.1060414
+CJSWG   = 3.3E-10        PBSWG   = 0.809286       MJSWG   = 0.1060414
+CF      = 0              PVTH0   = -1.192722E-3   PRDSW   = -5
+PK2     = 6.450505E-5    WKETA   = -4.27294E-4    LKETA   = -0.0104078
+PU0     = 6.3268729      PUA     = 2.226552E-11   PUB     = 0
+PVSAT   = 969.1480157    PETA0   = 1E-4           PKETA   = -1.049509E-3    )
*
.MODEL CMOSP PMOS (                                LEVEL   = 49
+VERSION = 3.1            TNOM    = 27             TOX     = 4.1E-9
+XJ      = 1E-7           NCH     = 4.1589E17      VTH0    = -0.3938813
+K1      = 0.5479015      K2      = 0.0360586      K3      = 0.0993095
+K3B     = 5.7086622      W0      = 1E-6           NLX     = 1.313191E-7
+DVT0W   = 0              DVT1W   = 0              DVT2W   = 0
+DVT0    = 0.4911363      DVT1    = 0.2227356      DVT2    = 0.1
+U0      = 115.6852975    UA      = 1.505832E-9    UB      = 1E-21
+UC      = -1E-10         VSAT    = 1.329694E5     A0      = 1.7590478
+AGS     = 0.3641621      B0      = 3.427126E-7    B1      = 1.062928E-6
+KETA    = 0.0134667      A1      = 0.6859506      A2      = 0.3506788
+RDSW    = 168.5705677    PRWG    = 0.5            PRWB    = -0.4987371
+WR      = 1              WINT    = 0              LINT    = 3.028832E-8
+XL      = 0              XW      = -1E-8          DWG     = -2.349633E-8
+DWB     = -7.152486E-9   VOFF    = -0.0994037     NFACTOR = 1.9424315
+CIT     = 0              CDSC    = 2.4E-4         CDSCD   = 0
+CDSCB   = 0              ETA0    = 0.0608072      ETAB    = -0.0426148
+DSUB    = 0.7343015      PCLM    = 3.2579974      PDIBLC1 = 7.229527E-6
+PDIBLC2 = 0.025389       PDIBLCB = -1E-3          DROUT   = 0
+PSCBE1  = 1.454878E10    PSCBE2  = 4.202027E-9    PVAG    = 15
+DELTA   = 0.01           RSH     = 7.8            MOBMOD  = 1
+PRT     = 0              UTE     = -1.5           KT1     = -0.11
+KT1L    = 0              KT2     = 0.022          UA1     = 4.31E-9
+UB1     = -7.61E-18      UC1     = -5.6E-11       AT      = 3.3E4
+WL      = 0              WLN     = 1              WW      = 0
+WWN     = 1              WWL     = 0              LL      = 0
+LLN     = 1              LW      = 0              LWN     = 1
+LWL     = 0              CAPMOD  = 2              XPART   = 0.5
+CGDO    = 6.32E-10       CGSO    = 6.32E-10       CGBO    = 1E-12
+CJ      = 1.172138E-3    PB      = 0.8421173      MJ      = 0.4109788
+CJSW    = 2.242609E-10   PBSW    = 0.8            MJSW    = 0.3752089
+CJSWG   = 4.22E-10       PBSWG   = 0.8            MJSWG   = 0.3752089
+CF      = 0              PVTH0   = 1.888482E-3    PRDSW   = 11.5315407
+PK2     = 1.559399E-3    WKETA   = 0.0319301      LKETA   = 2.955547E-3
+PU0     = -1.1105313     PUA     = -4.62102E-11   PUB     = 1E-21
+PVSAT   = 50             PETA0   = 1E-4           PKETA   = -4.346368E-3    )
*

